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The structure of tetrahedral amorphous carbon thin films
Conference presentation   Peer reviewed

The structure of tetrahedral amorphous carbon thin films

SRP Silva, S Xu, BK Tay, HS Tan, HJ Scheibe, M Chhowalla and WI Milne
THIN SOLID FILMS, Vol.290, pp.317-322
23rd International Conference on Metallurgical Coatings and Thin Films (SAN DIEGO, CA, 22/04/1996 - 26/04/1996)
15/12/1996
DOI: https://doi.org/10.1016/S0040-6090(96)09182-1

Abstract

Science & Technology Technology Physical Sciences Materials Science Multidisciplinary Materials Science Coatings & Films Physics Applied Physics Condensed Matter Materials Science Physics MATERIALS SCIENCE COATINGS & FILMS MATERIALS SCIENCE MULTIDISCIPLINARY PHYSICS APPLIED PHYSICS CONDENSED MATTER tetrahedral amorphous carbon amorphous carbon vacuum are deposition electron energy loss spectroscopy (EELS) DIAMOND-LIKE CARBON SUBPLANTATION MODEL COMPRESSIVE-STRESS ARC EVAPORATION VACUUM-ARC DEPOSITION GROWTH MECHANISMS
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