Structures and light emission properties of ion beam synthesized FeSi2 in silicon

CF Chow; Y Gao; SP Wong; N Ke; Q Li; WY Cheung; G Shao; MA Lourenco; KP Homewood

doi:10.1117/12.582335

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Journal article

Structures and light emission properties of ion beam synthesized FeSi2 in silicon

CF Chow, Y Gao, SP Wong, N Ke, Q Li, WY Cheung, G Shao, MA Lourenco and KP Homewood

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, Vol.5650, pp.17-22

01/01/2005

DOI: https://doi.org/10.1117/12.582335

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Materials Science

Characterization & Testing

Optics

Materials Science

iron-disilicide

FeSi2

photoluminescence

electroluminescence

metal-oxide-semiconductor

MU-M

BETA-FESI2

SI

TEMPERATURE

IMPLANTATION

ORIGIN

STRAIN

GAP

PHOTOLUMINESCENCE

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Title: Structures and light emission properties of ion beam synthesized FeSi2 in silicon
Creators: CF Chow
Y Gao
SP Wong
N Ke
Q Li
WY Cheung
G Shao
MA Lourenco
KP Homewood
Contributors: JC Chiao
DN Jamieson
L Faraone
AS Dzurak
Publication Details: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, Vol.5650, pp.17-22
Publisher: SPIE-INT SOC OPTICAL ENGINEERING
Date published: 01/01/2005
Date submitted: 17/05/2017
Identifiers: 99516508002346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Structures and light emission properties of ion beam synthesized FeSi2 in silicon

Abstract

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