Surrey researchers Sign in
Porous freestanding diamond membranes with reduced pore diameter
Journal article   Peer reviewed

Porous freestanding diamond membranes with reduced pore diameter

V.P. Mammana, S. Silva, R.D. Mansano, P. Verdonck, A. Pavani Filho, M.C. Salvadori, I.G. Brown and S Ravi Pradip Silva
Thin solid films, Vol.353(1), pp.239-243
29/09/1999

Abstract

Chemical vapor deposition (CVD) Diamond Plasma processing and deposition Surface morphology
We have shown previously that porous diamond membranes can be fabricated using a method based on growing diamond on a patterned silicon substrate. The technique used to pattern the silicon is conventional lithography. In this work we present a method for reducing the pore size using diamond post-deposition over the membrane. An important concern in this work was to determine the pore-shutting rate, considering the time post-deposition and the pore morphology.

Metrics

Details

Usage Policy