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Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp(3) fraction deposited using a filtered cathodic arc
Journal article

Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp(3) fraction deposited using a filtered cathodic arc

S Xu, D Flynn, BK Tay, S Prawer, KW Nugent, SRP Silva, Y Lifshitz and WI Milne
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, Vol.76(3), pp.351-361
01/09/1997

Abstract

Science & Technology Technology Physical Sciences Materials Science Multidisciplinary Mechanics Physics Applied Physics Condensed Matter Materials Science Physics DIAMOND-LIKE CARBON ELASTIC-MODULUS ION ENERGY HARDNESS EVAPORATION
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