Abstract
A laser direct-writing method producing high-resolution patterns of gold, silver and alloy plasmonic nanoparticles implanted into the surface of glass substrates is demonstrated, by scanning a pulsed UV laser beam across selected areas of ultra-thin metal films. The nanoparticles are incorporated beneath the surface of the glass and hence the patterns are scratch-resistant. The physical mechanisms controlling the process are investigated and we demonstrate that this technique can be used to fabricate a wide range of plasmonic optical structures such as wavelength selected diffraction gratings and high-density substrates for lab-on-chip surface-enhanced Raman spectroscopy.