Abstract
The development of a NanoGrowth tool to synthesize nanotubes at low temperatures is discussed. growing future prospects of carbon nanotubes to form the basis of a variety of applications, from semiconductor interconnects to solid-state lighting and solar cells is discussed. CEVP Ltd and the Advanced Technology Institute (ATI) has developed a NanoGrowth tool for producing carbon nanotubes at lower temperatures. The NanoGrowth tool uses careful tailoring of the plasma and a unique thermal control system to maintain the substrate at room temperature. This change in the processing concept allows the tool to be extended to the synthesis of other nanomaterials, such as silicon and metal-oxide nanowires, at low substrate temperatures. The tool also aims to spur the commercialization of carbon-nanotube-related applications through its reliable output and enhanced control over the growth process.