Abstract
Electron paramagnetic resonance ~EPR! measurements have been made of amorphous hydrogenated carbon ~a-C:H! films grown by plasma enhanced chemical vapor deposition ~PECVD! with negative self-bias voltages Vb in the approximate range 10–540 V. For Vb,100 V, as the film changes from polymerlike to diamondlike, the changes in linewidth and shape are interpreted in terms of changes to two contributions—one due to dipolar interactions between the unpaired spins and one due to unresolved lines arising from hyperfine interactions with H1. The former yields a Lorentzian line, the latter a Gaussian, and the resultant spectrum has the Voigt shape. The empirical relation DBpp G ~in Gauss!5~0.1860.05!3~at.%H) between the peak-to-peak Gaussian contribution ~in Gauss! DBpp G and the hydrogen content in atomic percentage is obtained. For Vb.100 V the linewidth is shown to be dominated by the dipolar interactions and exchange and it decreases as Vb increases; the change is shown to arise primarily from a change in the exchange interaction. Evidence for this comes from measurements which show that the spin-lattice relaxation time appreciably shortens and the spin-spin relaxation time lengthens as the bias voltage is increased. The magnitude and variation with bias of the linewidth are consistent with the EPR signal originating from the p-type radicals.