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Development of a fast acting vacuum isolation valve for use with ambient ion beam analysis techniques
Journal article   Peer reviewed

Development of a fast acting vacuum isolation valve for use with ambient ion beam analysis techniques

L. Antwis, M. Browton and V. Palitsin
Vacuum, Vol.99, pp.26-27
01/01/2014

Abstract

Materials Science Materials Science, Multidisciplinary Physical Sciences Physics Physics, Applied Science & Technology Technology
The development of an ambient pressure MeV SIMS ion beam analysis capability at the Surrey Ion Beam Centre has necessitated the development of a system to protect the vacuum integrity of the main 2 MV tandem particle accelerator. The development and operating characteristics of a fast acting vacuum isolation valve based on the principle of an induction coil are reported and shown to be suitable for the intended application. (c) 2013 Elsevier Ltd. All rights reserved.

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