Logo image
Open Research University homepage
Surrey researchers Sign in
Challenges in integration of piezoelectric ceramics in micro electromechanical systems
Journal article   Peer reviewed

Challenges in integration of piezoelectric ceramics in micro electromechanical systems

Materials science forum, Vol.606, pp.43-50
01/01/2009

Abstract

Lead zirconate titanate (PZT) thick films, a few tens of micrometres thick, are of technological interest for integration with microsystems to create micro electromechanical systems (MEMS) with high sensitivity and power output. This paper examines the challenges faced in integrating thick film PZT with other materials to create functional micro devices. Thermal, chemical and mechanical challenges associated with integration will be examined and potential solutions explored.

Metrics

Details

Logo image

Usage Policy