- Title
- An improved gallium liquid metal ion source geometry for nanotechnology
- Creators
- J. J VAN ES - CNRS-LPN, Route de Nozay, Marcoussis 91460, FranceJ Gierak - CNRS-LPN, Route de Nozay, Marcoussis 91460, FranceR. G Forties - School of Electronics and Physical Sciences, Advanced Technology Institute (BB), University of Surrey, Guildford, Surrey GU2 7XH, United KingdomV. G Suvorov - School of Electronics and Physical Sciences, Advanced Technology Institute (BB), University of Surrey, Guildford, Surrey GU2 7XH, United KingdomT VAN DEN BERGHE - CEA Saclay - Laboratoire de Microscopie et de Rayons X, 91191 Gif sur Yvette, FrancePh Dubuisson - CEA Saclay - Laboratoire de Microscopie et de Rayons X, 91191 Gif sur Yvette, FranceI Monnet - CEA Saclay - Laboratoire de Microscopie et de Rayons X, 91191 Gif sur Yvette, FranceA Septier - CNAM, 292 rue Saint-Martin, 75141 Paris, FranceRichard G. Forbes - Department of Electrical and Electronic Engineering
- Publication Details
- Microelectronic engineering, Vol.73-74, pp.132-138
- Conference
- Proceedings of the 29th Conference on Micro and Nano Engineering, September 22-25, 2003, Cambridge, United Kingdom
- Publisher
- Elsevier Science
- Number of pages
- 7
- Date published
- 06/2004
- Identifiers
- 99928597202346
- Academic Unit
- School of Computer Science and Electronic Engineering
- Language
- English
- Resource Type
- Conference proceeding
Conference proceeding
An improved gallium liquid metal ion source geometry for nanotechnology
Microelectronic engineering, Vol.73-74, pp.132-138
Proceedings of the 29th Conference on Micro and Nano Engineering, September 22-25, 2003, Cambridge, United Kingdom
06/2004
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