Gas cluster ion bombardment of GaAs: XPS depth profiles and molecular dynamics modelling

Conference proceeding

Helen Oppong-Mensah, Mark A. Baker, Tim Nunney, Richard G. White, Jonathon England, Alexander Rubinstein and John F. Watts

Photoemission Spectroscopy for Materials Analysis II

12/10/2021

Abstract

Chemical physics

Cluster (physics)

Ion bombardment

Materials science

Molecular dynamics

X-ray photoelectron spectroscopy

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Title: Gas cluster ion bombardment of GaAs: XPS depth profiles and molecular dynamics modelling
Creators: Helen Oppong-Mensah - University of Surrey
Mark A. Baker - University of Surrey
Tim Nunney - Thermo Fisher Scientific
Richard G. White - Thermo Fisher Scientific
Jonathon England - University of Surrey
Alexander Rubinstein - University of Surrey
John F. Watts - University of Surrey
Publication Details: Photoemission Spectroscopy for Materials Analysis II
Publisher: SPIE
Date published: 12/10/2021
Identifiers: 99844948002346
Academic Unit: School of Mechanical Engineering Sciences
Language: English
Resource Type: Conference proceeding