Determination of bonding in amorphous carbons by electron energy loss spectroscopy, Raman scattering and X-ray reflectivity

A. C. Ferrari; B. Kleinsorge; G Adamopoulos; J. Robertson; WI Milne; Vlad Stolojan; L. M. Brown; A. Libassi; BK Tanner

doi:10.1016/S0022-3093(00)00035-1

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Determination of bonding in amorphous carbons by electron energy loss spectroscopy, Raman scattering and X-ray reflectivity

Journal article

Peer reviewed

Determination of bonding in amorphous carbons by electron energy loss spectroscopy, Raman scattering and X-ray reflectivity

A. C. Ferrari, B. Kleinsorge, G Adamopoulos, J. Robertson, WI Milne, Vlad Stolojan, L. M. Brown, A. Libassi and BK Tanner

Journal of non-crystalline solids, Vol.266-269(Part 2), pp.765-768

01/05/2000

DOI: https://doi.org/10.1016/S0022-3093(00)00035-1

Abstract

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X-ray reflectivity (XRR) and Raman scattering are developed as non-destructive methods to find the density and sp 3 content of unhydrogenated and hydrogenated amorphous carbon films. An empirical relationship is found to derive the sp 3 fraction from visible Raman spectra, while ultraviolet (UV) Raman is able to directly detect sp 3 sites. The sp 3 fraction and density are linearly correlated in amorphous carbon (a-C) and hydrogenated amorphous carbon (a-C:H) films.

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Title: Determination of bonding in amorphous carbons by electron energy loss spectroscopy, Raman scattering and X-ray reflectivity
Creators: A. C. Ferrari - Department of Engineering, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, UK
B. Kleinsorge - Department of Engineering, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, UK
G Adamopoulos - Department of Engineering, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, UK
J. Robertson - Department of Engineering, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, UK
WI Milne - Department of Engineering, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, UK
Vlad Stolojan
L. M. Brown - Cavendish Labs, Cambridge University, Cambridge CB3 0HE, UK
A. Libassi - Department of Physics, Durham University, Durham, UK
BK Tanner - Department of Physics, Durham University, Durham, UK
Publication Details: Journal of non-crystalline solids, Vol.266-269(Part 2), pp.765-768
Publisher: Elsevier B.V
Date published: 01/05/2000
Identifiers: 99816464802346
Academic Unit: School of Computer Science and Electronic Engineering
Language: English
Resource Type: Journal article

Determination of bonding in amorphous carbons by electron energy loss spectroscopy, Raman scattering and X-ray reflectivity

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