Caesium sputter ion source compatible with commercial SIMS instruments

SF Belykh; V Palitsin; IV Veryovkin; AP Kovarsky; RJH Chang; A Adriaens; M Dowsett; F Adams

doi:10.1016/j.apsusc.2006.02.172

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Caesium sputter ion source compatible with commercial SIMS instruments

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Caesium sputter ion source compatible with commercial SIMS instruments

SF Belykh, V Palitsin, IV Veryovkin, AP Kovarsky, RJH Chang, A Adriaens, M Dowsett and F Adams

APPLIED SURFACE SCIENCE, Vol.252(19), pp.7321-7325

15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV) (Univ Manchester, Manchester, ENGLAND, 12/09/2005 - 16/09/2005)

30/07/2006

DOI: https://doi.org/10.1016/j.apsusc.2006.02.172

Abstract

Science & Technology

Physical Sciences

Technology

Chemistry

Physical

Materials Science

Coatings & Films

Physics

Applied

Physics

Condensed Matter

Chemistry

Materials Science

Physics

CHEMISTRY

PHYSICAL

MATERIALS SCIENCE

COATINGS & FILMS

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

caesium sputter ion source

non-additive sputtering

atomic and cluster ion bombardment

depth profiling

floating low energy ion gun

cluster-solid interaction

CLUSTER IONS

BOMBARDMENT

BEAMS

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Title: Caesium sputter ion source compatible with commercial SIMS instruments
Creators: SF Belykh
V Palitsin
IV Veryovkin
AP Kovarsky
RJH Chang
A Adriaens
M Dowsett
F Adams
Contributors: ELSEVIER SCIENCE BV (Publisher)
Publication Details: APPLIED SURFACE SCIENCE, Vol.252(19), pp.7321-7325
Conference: 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV) (Univ Manchester, Manchester, ENGLAND, 12/09/2005 - 16/09/2005)
Date published: 30/07/2006
Date submitted: 17/05/2017
Identifiers: 99516877602346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Caesium sputter ion source compatible with commercial SIMS instruments

Abstract

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