- Title
- Computer Codes and Simulation Background to Ion Implantation Distribution and Sputtering Programs
- Creators
- RP Webb
- Contributors
- D Briggs (Editor)MP Seah (Editor)
- Publication Details
- Practical Surface Analysis: Ion and neutral spectroscopy, Vol.2(Append), pp.657-704
- Publisher
- John Wiley & Son Ltd
- Number of pages
- 48
- Date published
- 1992
- Date submitted
- 17/05/2017
- Identifiers
- 99516790502346
- Academic Unit
- University of Surrey
- Resource Type
- Book chapter
Book chapter
Computer Codes and Simulation Background to Ion Implantation Distribution and Sputtering Programs
Practical Surface Analysis: Ion and neutral spectroscopy, Vol.2(Append), pp.657-704
John Wiley & Son Ltd
1992
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