- Title
- Maskless proton beam writing in gallium arsenide
- Creators
- P MistryI Gomez-MorillaRC SmithD ThomsonGW GrimeRP WebbR GwilliamC JeynesA CansellM MerchantKJ Kirkby
- Contributors
- ELSEVIER SCIENCE BV (Publisher)
- Publication Details
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.260(1), pp.437-441
- Conference
- 10th International Conference on Nuclear Microprobe Technology and Applications held in Conjunction with the 2nd International Workshop on Proton Beam Writing (Singapore, SINGAPORE, 09/07/2006–14/07/2006)
- Publication Date
- 01/07/2007
- Identifiers
- 99516372502346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
Maskless proton beam writing in gallium arsenide
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.260(1), pp.437-441
10th International Conference on Nuclear Microprobe Technology and Applications held in Conjunction with the 2nd International Workshop on Proton Beam Writing (Singapore, SINGAPORE, 09/07/2006–14/07/2006)
01/07/2007