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Inverted method for fabricating a nano-aperture device with subwavelength structures
Journal article   Open access  Peer reviewed

Inverted method for fabricating a nano-aperture device with subwavelength structures

A Suutala, J Olkkonen, DC Cox, J Lappalainen and H Jantunen
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol.27(6), pp.2457-2461
01/11/2009
DOI: https://doi.org/10.1116/1.3263225

Abstract

Science & Technology Technology Physical Sciences Engineering Electrical & Electronic Nanoscience & Nanotechnology Physics Applied Engineering Science & Technology - Other Topics Physics aluminium atomic force microscopy electron beam deposition focused ion beam technology nanopatterning nanostructured materials organic compounds plasmonics scanning electron microscopy ENHANCED LIGHT TRANSMISSION OPTICAL-TRANSMISSION HOLE ARRAYS SURFACE CORRUGATIONS
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