Rapid deep micromachining of polytetrafluoroethylene by MeV icon bombardment in oxygen-rich atmospheres

I Gomez-Morilla; CJ Sofield; GW Grime; R Gwilliam

doi:10.1088/0960-1317/15/4/004

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Rapid deep micromachining of polytetrafluoroethylene by MeV icon bombardment in oxygen-rich atmospheres

Journal article

Peer reviewed

Rapid deep micromachining of polytetrafluoroethylene by MeV icon bombardment in oxygen-rich atmospheres

I Gomez-Morilla, CJ Sofield, GW Grime and R Gwilliam

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Vol.15(4), pp.698-701

01/04/2005

DOI: https://doi.org/10.1088/0960-1317/15/4/004

Abstract

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Materials Science

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INSTRUMENTS & INSTRUMENTATION

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MECHANICS

NANOSCIENCE & NANOTECHNOLOGY

ION-BEAM

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Title: Rapid deep micromachining of polytetrafluoroethylene by MeV icon bombardment in oxygen-rich atmospheres
Creators: I Gomez-Morilla
CJ Sofield
GW Grime
R Gwilliam
Publication Details: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Vol.15(4), pp.698-701
Publisher: IOP PUBLISHING LTD
Date published: 01/04/2005
Date submitted: 17/05/2017
Identifiers: 99516216302346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Rapid deep micromachining of polytetrafluoroethylene by MeV icon bombardment in oxygen-rich atmospheres

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