Micropatterning of Foturan photosensitive glass following exposure to MeV proton beams

I Gomez-Morilla; MH Abraham; DG de Kerckhove; GW Grime

doi:10.1088/0960-1317/15/4/006

Back

Micropatterning of Foturan photosensitive glass following exposure to MeV proton beams

Journal article

Peer reviewed

Micropatterning of Foturan photosensitive glass following exposure to MeV proton beams

I Gomez-Morilla, MH Abraham, DG de Kerckhove and GW Grime

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Vol.15(4), pp.706-709

01/04/2005

DOI: https://doi.org/10.1088/0960-1317/15/4/006

Abstract

Science & Technology

Technology

Engineering

Electrical & Electronic

Nanoscience & Nanotechnology

Instruments & Instrumentation

Materials Science

Multidisciplinary

Mechanics

Engineering

Science & Technology - Other Topics

Materials Science

ENGINEERING

ELECTRICAL & ELECTRONIC

INSTRUMENTS & INSTRUMENTATION

MATERIALS SCIENCE

MULTIDISCIPLINARY

MECHANICS

NANOSCIENCE & NANOTECHNOLOGY

LITHOGRAPHY

Files and links (1)

url

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000228709400006&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11d2a86992e85fb529977dad66a846d5View

Author

Metrics

41 Record Views

14 Times Cited - Web of Science

See more details

Details

Title: Micropatterning of Foturan photosensitive glass following exposure to MeV proton beams
Creators: I Gomez-Morilla
MH Abraham
DG de Kerckhove
GW Grime
Publication Details: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Vol.15(4), pp.706-709
Publisher: IOP PUBLISHING LTD
Date published: 01/04/2005
Date submitted: 17/05/2017
Identifiers: 99516205202346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Micropatterning of Foturan photosensitive glass following exposure to MeV proton beams

Abstract

Files and links (1)

Metrics

Details

Usage Policy