An improved gallium liquid metal ion source geometry for nanotechnology

JJ Van Es; J Gierak; RG Forbes; VG Suvorov; T Van den Berghe; P Dubuisson; I Monnet; A Septier

doi:10.1016/j.mee.2004.02.029

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An improved gallium liquid metal ion source geometry for nanotechnology

Journal article

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An improved gallium liquid metal ion source geometry for nanotechnology

JJ Van Es, J Gierak, RG Forbes, VG Suvorov, T Van den Berghe, P Dubuisson, I Monnet and A Septier

MICROELECTRONIC ENGINEERING, Vol.73-4, pp.132-138

01/06/2004

DOI: https://doi.org/10.1016/j.mee.2004.02.029

Abstract

Science & Technology

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Title: An improved gallium liquid metal ion source geometry for nanotechnology
Creators: JJ Van Es
J Gierak
RG Forbes
VG Suvorov
T Van den Berghe
P Dubuisson
I Monnet
A Septier
Publication Details: MICROELECTRONIC ENGINEERING, Vol.73-4, pp.132-138
Publisher: ELSEVIER SCIENCE BV
Date published: 01/06/2004
Date submitted: 17/05/2017
Identifiers: 99516114602346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

An improved gallium liquid metal ion source geometry for nanotechnology

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