Theory of minimum emission current for a non-turbulent liquid-metal ion source

VG Suvorov; RG Forbes

doi:10.1016/j.mee.2004.02.028

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Theory of minimum emission current for a non-turbulent liquid-metal ion source

Journal article

Peer reviewed

Theory of minimum emission current for a non-turbulent liquid-metal ion source

VG Suvorov and RG Forbes

MICROELECTRONIC ENGINEERING, Vol.73-4, pp.126-131

01/06/2004

DOI: https://doi.org/10.1016/j.mee.2004.02.028

Abstract

Science & Technology

Technology

Physical Sciences

Engineering

Electrical & Electronic

Nanoscience & Nanotechnology

Optics

Physics

Applied

Engineering

Science & Technology - Other Topics

Physics

ENGINEERING

ELECTRICAL & ELECTRONIC

NANOSCIENCE & NANOTECHNOLOGY

OPTICS

PHYSICS

APPLIED

FIB machines

liquid metal ion source

LMIS minimum current

FIELD EVAPORATION

SHAPE

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Title: Theory of minimum emission current for a non-turbulent liquid-metal ion source
Creators: VG Suvorov
RG Forbes
Publication Details: MICROELECTRONIC ENGINEERING, Vol.73-4, pp.126-131
Publisher: ELSEVIER SCIENCE BV
Date published: 01/06/2004
Date submitted: 17/05/2017
Identifiers: 99515957802346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Theory of minimum emission current for a non-turbulent liquid-metal ion source

Abstract

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