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Frequency noise level of as ion implanted TiN-Ti-Si structures
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Frequency noise level of as ion implanted TiN-Ti-Si structures

M Stojanovic, C Jeynes, N Bibic, M Milosavljevic, A Vasic and Z Milosevic
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.115(1-4), pp.554-556
16th International Conference on Atomic Collisions in Solids (ICACS-16) (LINZ, AUSTRIA, 17/07/1995 - 21/07/1995)
01/07/1996

Abstract

Science & Technology Technology Physical Sciences Instruments & Instrumentation Nuclear Science & Technology Physics Atomic Molecular & Chemical Physics Nuclear Physics INSTRUMENTS & INSTRUMENTATION NUCLEAR SCIENCE & TECHNOLOGY PHYSICS ATOMIC MOLECULAR & CHEMICAL PHYSICS NUCLEAR SILICIDES CONTACTS SILICON
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