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Measurement of lateral stress in argon implanted thin gold films using quartz resonator techniques
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Measurement of lateral stress in argon implanted thin gold films using quartz resonator techniques

AS Way, C Jeynes and RP Webb
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.148(1-4), pp.238-241
11th International Conference on Ion Beam Modification of Materials (IBMM98) (ROYAL TROP INST, AMSTERDAM, NETHERLANDS, 31/08/1998 - 04/09/1998)
01/01/1999

Abstract

Science & Technology Technology Physical Sciences Instruments & Instrumentation Nuclear Science & Technology Physics Atomic Molecular & Chemical Physics Nuclear Physics INSTRUMENTS & INSTRUMENTATION NUCLEAR SCIENCE & TECHNOLOGY PHYSICS ATOMIC MOLECULAR & CHEMICAL PHYSICS NUCLEAR sputtering stress quartz resonators RBS
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