- Title
- NONDESTRUCTIVE CHARACTERIZATION OF SIMOX STRUCTURES
- Creators
- RM GEATCHESKJ REESONAJ CRIDDLERP WEBBPJ PEARSONPLF HEMMENTA NEJIM
- Publication Details
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.84(2), pp.258-264
- Publisher
- ELSEVIER SCIENCE BV
- Date published
- 01/02/1994
- Date submitted
- 17/05/2017
- Identifiers
- 99515512102346
- Academic Unit
- University of Surrey
- Language
- English
- Resource Type
- Journal article
Journal article
NONDESTRUCTIVE CHARACTERIZATION OF SIMOX STRUCTURES
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.84(2), pp.258-264
01/02/1994
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