PROTON MICROSCOPY OF A MICROCIRCUIT LAYER STRUCTURE

MBH BREESE; F WATT; GW GRIME; PJC KING

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PROTON MICROSCOPY OF A MICROCIRCUIT LAYER STRUCTURE

MBH BREESE, F WATT, GW GRIME and PJC KING

MICROSCOPY OF SEMICONDUCTING MATERIALS 1991, Vol.117, pp.101-104

CONF ON MICROSCOPY OF SEMICONDUCTING MATERIALS (OXFORD UNIV, OXFORD, ENGLAND, 25/03/1991 - 28/03/1991)

01/01/1991

Abstract

Science & Technology

Physical Sciences

Technology

Mathematics

Microscopy

Physics

Condensed Matter

Physics

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Title: PROTON MICROSCOPY OF A MICROCIRCUIT LAYER STRUCTURE
Creators: MBH BREESE
F WATT
GW GRIME
PJC KING
Contributors: AG CULLIS
NJ LONG
IOP PUBLISHING LTD (Publisher)
Publication Details: MICROSCOPY OF SEMICONDUCTING MATERIALS 1991, Vol.117, pp.101-104
Conference: CONF ON MICROSCOPY OF SEMICONDUCTING MATERIALS (OXFORD UNIV, OXFORD, ENGLAND, 25/03/1991 - 28/03/1991)
Date published: 01/01/1991
Date submitted: 17/05/2017
Identifiers: 99515490902346
Academic Unit: University of Surrey
Resource Type: Conference presentation

PROTON MICROSCOPY OF A MICROCIRCUIT LAYER STRUCTURE

Abstract

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