PROBLEMS USING THE SIGMUND FORMULA FOR THE CALCULATION OF SPUTTERING YIELDS

RP WEBB; IH WILSON

doi:10.1016/0042-207X(89)91113-5

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PROBLEMS USING THE SIGMUND FORMULA FOR THE CALCULATION OF SPUTTERING YIELDS

Journal article

Peer reviewed

PROBLEMS USING THE SIGMUND FORMULA FOR THE CALCULATION OF SPUTTERING YIELDS

RP WEBB and IH WILSON

VACUUM, Vol.39(11-12), pp.1163-1165

01/01/1989

DOI: https://doi.org/10.1016/0042-207X(89)91113-5

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

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Title: PROBLEMS USING THE SIGMUND FORMULA FOR THE CALCULATION OF SPUTTERING YIELDS
Creators: RP WEBB
IH WILSON
Publication Details: VACUUM, Vol.39(11-12), pp.1163-1165
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Date published: 01/01/1989
Date submitted: 17/05/2017
Identifiers: 99515442902346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

PROBLEMS USING THE SIGMUND FORMULA FOR THE CALCULATION OF SPUTTERING YIELDS

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