ION-BEAM-INDUCED DENSIFICATION OF ZIRCONIA SOL-GEL THIN-FILMS

TE LEVINE; JL KEDDIE; P REVESZ; JW MAYER; EP GIANNELIS

doi:10.1111/j.1151-2916.1993.tb03769.x

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ION-BEAM-INDUCED DENSIFICATION OF ZIRCONIA SOL-GEL THIN-FILMS

Journal article

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ION-BEAM-INDUCED DENSIFICATION OF ZIRCONIA SOL-GEL THIN-FILMS

TE LEVINE, JL KEDDIE, P REVESZ, JW MAYER and EP GIANNELIS

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Vol.76(5), pp.1369-1379

01/05/1993

DOI: https://doi.org/10.1111/j.1151-2916.1993.tb03769.x

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

SPIN-ON-GLASS

REFRACTIVE-INDEX

IMPLANTATION

SILICA

SPECTRA

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Title: ION-BEAM-INDUCED DENSIFICATION OF ZIRCONIA SOL-GEL THIN-FILMS
Creators: TE LEVINE
JL KEDDIE
P REVESZ
JW MAYER
EP GIANNELIS
Publication Details: JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Vol.76(5), pp.1369-1379
Publisher: AMER CERAMIC SOC
Date published: 01/05/1993
Date submitted: 17/05/2017
Identifiers: 99515370302346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

ION-BEAM-INDUCED DENSIFICATION OF ZIRCONIA SOL-GEL THIN-FILMS

Abstract

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