MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE

MBH BREESE; PJC KING; GW GRIME; F WATT

doi:10.1063/1.351596

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MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE

Journal article

Peer reviewed

MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE

MBH BREESE, PJC KING, GW GRIME and F WATT

JOURNAL OF APPLIED PHYSICS, Vol.72(6), pp.2097-2104

15/09/1992

DOI: https://doi.org/10.1063/1.351596

Abstract

Science & Technology

Physical Sciences

Physics

Applied

Physics

PHYSICS

APPLIED

MICROSCOPY

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Title: MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE
Creators: MBH BREESE
PJC KING
GW GRIME
F WATT
Publication Details: JOURNAL OF APPLIED PHYSICS, Vol.72(6), pp.2097-2104
Publisher: AMER INST PHYSICS
Publication Date: 15/09/1992
Identifiers: 99515337602346; WOS:A1992JN51200001
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

MICROCIRCUIT IMAGING USING AN ION-BEAM-INDUCED CHARGE

Abstract

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