The Precision Implant 9500 Plasma Flood System

Conference presentation

Peer reviewed

H. Ito, T. Kamata, Jonathan England, I. Fotheringham, F. Plumb and M. Current

Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994

Ion Implantation Technology 94 (IIT 94) (Catania, Italy, 13/06/1994 - 17/06/1994)

16/05/1995

Abstract

url

https://www.elsevier.com/books/ion-implantation-technology-94/coffa/978-0-444-82194-2View

Published (Version of record)

32 Record Views

Title: The Precision Implant 9500 Plasma Flood System
Creators: H. Ito
T. Kamata
Jonathan England
I. Fotheringham
F. Plumb
M. Current
Contributors: S. Coffa
G. Ferla
E. Rimini
F. Priolo
Publication Details: Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994
Conference: Ion Implantation Technology 94 (IIT 94) (Catania, Italy, 13/06/1994 - 17/06/1994)
Date published: 16/05/1995
Date submitted: 15/06/2017
Identifiers: 99515280502346
Academic Unit: School of Computer Science and Electronic Engineering
Resource Type: Conference presentation