Bottom up fabrication of a nickel-lead zirconate titanate piezoelectric microcantilevers

SA Rocks; Q Tredez; HJ Almond; CP Shaw; RA Dorey

doi:10.1016/j.matlet.2008.09.011

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Bottom up fabrication of a nickel-lead zirconate titanate piezoelectric microcantilevers

Journal article

Peer reviewed

Bottom up fabrication of a nickel-lead zirconate titanate piezoelectric microcantilevers

SA Rocks, Q Tredez, HJ Almond, CP Shaw and RA Dorey

MATERIALS LETTERS, Vol.63(1), pp.88-90

15/01/2009

DOI: https://doi.org/10.1016/j.matlet.2008.09.011

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

Piezoelectric materials

Sol-gel preparation

Thick films

MEMS

Electroforming

COMPOSITE THICK-FILM

SENSITIVITY

CANTILEVERS

SENSORS

DEVICES

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Title: Bottom up fabrication of a nickel-lead zirconate titanate piezoelectric microcantilevers
Creators: SA Rocks
Q Tredez
HJ Almond
CP Shaw
RA Dorey
Publication Details: MATERIALS LETTERS, Vol.63(1), pp.88-90
Publisher: ELSEVIER SCIENCE BV
Date published: 15/01/2009
Date submitted: 17/05/2017
Identifiers: 99515272102346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Bottom up fabrication of a nickel-lead zirconate titanate piezoelectric microcantilevers

Abstract

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