Quality assurance in an implantation laboratory by high accuracy RBS

C Jeynes; N Peng; NP Barradas; RM Gwilliam

doi:10.1016/j.nimb.2006.03.171

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Quality assurance in an implantation laboratory by high accuracy RBS

Journal article

Peer reviewed

Quality assurance in an implantation laboratory by high accuracy RBS

C Jeynes, N Peng, NP Barradas and RM Gwilliam

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.249, pp.482-485

01/08/2006

DOI: https://doi.org/10.1016/j.nimb.2006.03.171

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

implantation

QA

accurate Rutherford backscattering

ION-BEAM ANALYSIS

SILICON

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Title: Quality assurance in an implantation laboratory by high accuracy RBS
Creators: C Jeynes
N Peng
NP Barradas
RM Gwilliam
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.249, pp.482-485
Publisher: ELSEVIER SCIENCE BV
Date published: 01/08/2006
Date submitted: 24/10/2014
Identifiers: 99515132502346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Quality assurance in an implantation laboratory by high accuracy RBS

Abstract

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