Micromoulding of PZT film structures using electrohydrodynamic atomization mould filling

D Wang; SA Rocks; RA Dorey

doi:10.1016/j.jeurceramsoc.2008.08.018

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Micromoulding of PZT film structures using electrohydrodynamic atomization mould filling

Journal article

Peer reviewed

Micromoulding of PZT film structures using electrohydrodynamic atomization mould filling

D Wang, SA Rocks and RA Dorey

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.29(6), pp.1147-1155

01/04/2009

DOI: https://doi.org/10.1016/j.jeurceramsoc.2008.08.018

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

PZT

Films

Suspensions

Micromoulding

Ferroelectric properties

LEAD-ZIRCONATE-TITANATE

PIEZOELECTRIC THICK-FILMS

ULTRASONIC TRANSDUCERS

MEMS

INFILTRATIONS

FABRICATION

DEPOSITION

CERAMICS

ACTUATOR

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Title: Micromoulding of PZT film structures using electrohydrodynamic atomization mould filling
Creators: D Wang
SA Rocks
RA Dorey
Publication Details: JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, Vol.29(6), pp.1147-1155
Publisher: ELSEVIER SCI LTD
Date published: 01/04/2009
Date submitted: 17/05/2017
Identifiers: 99515124102346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Micromoulding of PZT film structures using electrohydrodynamic atomization mould filling

Abstract

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