2 MEV AS+ IMPLANTATION IN INAS

E WENDLER; RJ WILSON; C JEYNES; W WESCH; K GARTNER; RM GWILLIAM; BJ SEALY

doi:10.1016/0168-583X(94)00504-4

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2 MEV AS+ IMPLANTATION IN INAS

E WENDLER, RJ WILSON, C JEYNES, W WESCH, K GARTNER, RM GWILLIAM and BJ SEALY

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.96(1-2), pp.298-301

10th International Conference on Ion Implantation Technology (CATANIA, ITALY, 13/06/1994 - 17/06/1994)

01/03/1995

DOI: https://doi.org/10.1016/0168-583X(94)00504-4

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

SEMICONDUCTORS

CRYSTALLINE

SILICON

MODEL

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Title: 2 MEV AS+ IMPLANTATION IN INAS
Creators: E WENDLER
RJ WILSON
C JEYNES
W WESCH
K GARTNER
RM GWILLIAM
BJ SEALY
Contributors: ELSEVIER SCIENCE BV (Publisher)
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.96(1-2), pp.298-301
Conference: 10th International Conference on Ion Implantation Technology (CATANIA, ITALY, 13/06/1994 - 17/06/1994)
Date published: 01/03/1995
Date submitted: 17/05/2017
Identifiers: 99514625302346
Academic Unit: University of Surrey
Resource Type: Conference presentation

2 MEV AS+ IMPLANTATION IN INAS

Abstract

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