ADVANCES OF NUCLEAR MICROSCOPY IN MICROELECTRONICS ANALYSIS

MBH BREESE; GW GRIME; F WATT; RJ BLAIKIE

doi:10.1016/0042-207X(93)90149-5

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ADVANCES OF NUCLEAR MICROSCOPY IN MICROELECTRONICS ANALYSIS

Journal article

Peer reviewed

ADVANCES OF NUCLEAR MICROSCOPY IN MICROELECTRONICS ANALYSIS

MBH BREESE, GW GRIME, F WATT and RJ BLAIKIE

VACUUM, Vol.44(3-4), pp.175-180

01/03/1993

DOI: https://doi.org/10.1016/0042-207X(93)90149-5

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

Applied

Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

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Title: ADVANCES OF NUCLEAR MICROSCOPY IN MICROELECTRONICS ANALYSIS
Creators: MBH BREESE
GW GRIME
F WATT
RJ BLAIKIE
Publication Details: VACUUM, Vol.44(3-4), pp.175-180
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Date published: 01/03/1993
Date submitted: 17/05/2017
Identifiers: 99514584802346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

ADVANCES OF NUCLEAR MICROSCOPY IN MICROELECTRONICS ANALYSIS

Abstract

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