A review of ion beam induced charge microscopy

MBH Breese; E Vittone; G Vizkelethy; PJ Sellin

doi:10.1016/j.nimb.2007.09.031

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A review of ion beam induced charge microscopy

Journal article

Peer reviewed

A review of ion beam induced charge microscopy

MBH Breese, E Vittone, G Vizkelethy and PJ Sellin

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.264(2), pp.345-360

01/11/2007

DOI: https://doi.org/10.1016/j.nimb.2007.09.031

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

IBIC microscopy

nuclear microprobes

charge transport measurements

SINGLE-EVENT UPSETS

HETEROJUNCTION BIPOLAR-TRANSISTORS

POLYCRYSTALLINE CVD DIAMOND

NUCLEAR MICROPROBE ANALYSIS

4H-SIC SCHOTTKY DIODES

LATERAL IBIC TECHNIQUE

MULTIPLE-BIT UPSET

HEAVY-ION

RADIATION DETECTORS

SEMICONDUCTOR-DEVICES

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Title: A review of ion beam induced charge microscopy
Creators: MBH Breese
E Vittone
G Vizkelethy
PJ Sellin
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.264(2), pp.345-360
Publisher: ELSEVIER SCIENCE BV
Date published: 01/11/2007
Date submitted: 17/05/2017
Identifiers: 99514580002346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

A review of ion beam induced charge microscopy

Abstract

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