MEV PROTON MICROPROBE ANALYSIS OF SILICON ON INSULATOR STRUCTURES

DN JAMIESON; GW GRIME; F WATT; DA WILLIAMS

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MEV PROTON MICROPROBE ANALYSIS OF SILICON ON INSULATOR STRUCTURES

Journal article

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MEV PROTON MICROPROBE ANALYSIS OF SILICON ON INSULATOR STRUCTURES

DN JAMIESON, GW GRIME, F WATT and DA WILLIAMS

INSTITUTE OF PHYSICS CONFERENCE SERIES, (100), pp.87-92

01/01/1989

Abstract

Science & Technology

Physical Sciences

Physics

Multidisciplinary

Physics

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Title: MEV PROTON MICROPROBE ANALYSIS OF SILICON ON INSULATOR STRUCTURES
Creators: DN JAMIESON
GW GRIME
F WATT
DA WILLIAMS
Publication Details: INSTITUTE OF PHYSICS CONFERENCE SERIES, (100), pp.87-92
Publisher: IOP PUBLISHING LTD
Date published: 01/01/1989
Date submitted: 17/05/2017
Identifiers: 99514244702346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

MEV PROTON MICROPROBE ANALYSIS OF SILICON ON INSULATOR STRUCTURES

Abstract

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