Electroceramic thick film fabrication for MEMS

RA Dorey; RW Whatmore

doi:10.1023/B:JECR.0000033999.74149.a3

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Electroceramic thick film fabrication for MEMS

Journal article

Peer reviewed

Electroceramic thick film fabrication for MEMS

RA Dorey and RW Whatmore

JOURNAL OF ELECTROCERAMICS, Vol.12(1-2), pp.19-32

01/01/2004

DOI: https://doi.org/10.1023/B:JECR.0000033999.74149.a3

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

thick films

electroceramics

MEMS

PZT

DIRECT-WRITE FABRICATION

ELECTROPHORETIC DEPOSITION

PIEZOELECTRIC PROPERTIES

RIGID SUBSTRATE

PZT CERAMICS

SILICON

COMPOSITE

COEFFICIENT

COATINGS

BEHAVIOR

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Title: Electroceramic thick film fabrication for MEMS
Creators: RA Dorey
RW Whatmore
Publication Details: JOURNAL OF ELECTROCERAMICS, Vol.12(1-2), pp.19-32
Publisher: KLUWER ACADEMIC PUBL
Publication Date: 01/01/2004
Identifiers: 99514229902346; WOS:000222448000003
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Electroceramic thick film fabrication for MEMS

Abstract

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Metrics

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