Micromoulding of lead zirconate titanate (PZT) structures for MEMS

A Navarro; SA Rocks; RA Dorey

doi:10.1007/s10832-007-9170-y

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Micromoulding of lead zirconate titanate (PZT) structures for MEMS

Conference presentation

Peer reviewed

Micromoulding of lead zirconate titanate (PZT) structures for MEMS

A Navarro, SA Rocks and RA Dorey

JOURNAL OF ELECTROCERAMICS, Vol.19(4), pp.321-326

Piezoceramics for End Users II Conference (Hafjell, NORWAY, 05/03/2006 - 08/03/2006)

01/12/2007

DOI: https://doi.org/10.1007/s10832-007-9170-y

Abstract

Science & Technology

Technology

Materials Science

Ceramics

Materials Science

MATERIALS SCIENCE

CERAMICS

ceramics

PZT

MEMS

micromoulding

THICK-FILMS

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Title: Micromoulding of lead zirconate titanate (PZT) structures for MEMS
Creators: A Navarro
SA Rocks
RA Dorey
Contributors: SPRINGER (Publisher)
Publication Details: JOURNAL OF ELECTROCERAMICS, Vol.19(4), pp.321-326
Conference: Piezoceramics for End Users II Conference (Hafjell, NORWAY, 05/03/2006 - 08/03/2006)
Date published: 01/12/2007
Date submitted: 17/05/2017
Identifiers: 99514125502346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Micromoulding of lead zirconate titanate (PZT) structures for MEMS

Abstract

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