CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS

VK RAMAN; F MAHMOOD; RA MCMAHON; H AHMED; C JEYNES; KW HUTT; N COOPER; DJ GODFREY

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CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS

Journal article

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CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS

VK RAMAN, F MAHMOOD, RA MCMAHON, H AHMED, C JEYNES, KW HUTT, N COOPER and DJ GODFREY

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, Vol.135(3), pp.C125-C125

01/03/1988

Abstract

Science & Technology

Physical Sciences

Technology

Electrochemistry

Materials Science

Coatings & Films

Materials Science

ELECTROCHEMISTRY

MATERIALS SCIENCE

COATINGS & FILMS

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Title: CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS
Creators: VK RAMAN
F MAHMOOD
RA MCMAHON
H AHMED
C JEYNES
KW HUTT
N COOPER
DJ GODFREY
Publication Details: JOURNAL OF THE ELECTROCHEMICAL SOCIETY, Vol.135(3), pp.C125-C125
Publisher: ELECTROCHEMICAL SOC INC
Date published: 01/03/1988
Date submitted: 17/05/2017
Identifiers: 99514102302346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS

Abstract

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Metrics

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