Microstructural characterisation of carbonaceous dust generated during the deposition of diamond-like carbon coatings

AP Burden; JV Anguita; SRP Silva

doi:10.1016/S0040-6090(98)00993-6

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Microstructural characterisation of carbonaceous dust generated during the deposition of diamond-like carbon coatings

Conference presentation

Peer reviewed

Microstructural characterisation of carbonaceous dust generated during the deposition of diamond-like carbon coatings

AP Burden, JV Anguita and SRP Silva

THIN SOLID FILMS, Vol.332(1-2), pp.252-256

25th International Conference on Metallurgical Coatings and Thin Films (SAN DIEGO, CALIFORNIA, 25/04/1998 - 01/05/1998)

02/11/1998

DOI: https://doi.org/10.1016/S0040-6090(98)00993-6

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Materials Science

Coatings & Films

Physics

Applied

Physics

Condensed Matter

Materials Science

Physics

MATERIALS SCIENCE

COATINGS & FILMS

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

PHYSICS

CONDENSED MATTER

plasma enhanced chemical vapour deposition (PECVD)

carbon

electron microscopy

RESOLUTION ELECTRON-MICROSCOPY

THIN-FILMS

AMORPHOUS-CARBON

C-60

PLASMAS

GROWTH

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Title: Microstructural characterisation of carbonaceous dust generated during the deposition of diamond-like carbon coatings
Creators: AP Burden
JV Anguita
SRP Silva
Contributors: ELSEVIER SCIENCE SA (Publisher)
Publication Details: THIN SOLID FILMS, Vol.332(1-2), pp.252-256
Conference: 25th International Conference on Metallurgical Coatings and Thin Films (SAN DIEGO, CALIFORNIA, 25/04/1998 - 01/05/1998)
Date published: 02/11/1998
Date submitted: 17/05/2017
Identifiers: 99514055002346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Microstructural characterisation of carbonaceous dust generated during the deposition of diamond-like carbon coatings

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