ION-BEAM INDUCED MIXING IN PD THIN-FILMS ON SILICON

N BIBIC; M MILOSAVLJEVIC; D PERUSKO; Y SERRUYS; C JEYNES

doi:10.1016/0168-583X(92)95860-T

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ION-BEAM INDUCED MIXING IN PD THIN-FILMS ON SILICON

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ION-BEAM INDUCED MIXING IN PD THIN-FILMS ON SILICON

N BIBIC, M MILOSAVLJEVIC, D PERUSKO, Y SERRUYS and C JEYNES

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.67(1-4), pp.500-503

14TH INTERNATIONAL CONF ON ATOMIC COLLISIONS IN SOLIDS ( ICACIS-14 ) (UNIV SALFORD, SALFORD, ENGLAND, 28/07/1991 - 02/08/1991)

01/04/1992

DOI: https://doi.org/10.1016/0168-583X(92)95860-T

Abstract

Science & Technology

Technology

Physical Sciences

Instruments & Instrumentation

Nuclear Science & Technology

Physics

Atomic

Molecular & Chemical

Physics

Nuclear

Physics

INSTRUMENTS & INSTRUMENTATION

NUCLEAR SCIENCE & TECHNOLOGY

PHYSICS

ATOMIC

MOLECULAR & CHEMICAL

PHYSICS

NUCLEAR

MARKER EXPERIMENTS

NI2SI

PD2SI

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Title: ION-BEAM INDUCED MIXING IN PD THIN-FILMS ON SILICON
Creators: N BIBIC
M MILOSAVLJEVIC
D PERUSKO
Y SERRUYS
C JEYNES
Contributors: ELSEVIER SCIENCE BV (Publisher)
Publication Details: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.67(1-4), pp.500-503
Conference: 14TH INTERNATIONAL CONF ON ATOMIC COLLISIONS IN SOLIDS ( ICACIS-14 ) (UNIV SALFORD, SALFORD, ENGLAND, 28/07/1991 - 02/08/1991)
Date published: 01/04/1992
Date submitted: 17/05/2017
Identifiers: 99514026902346
Academic Unit: University of Surrey
Resource Type: Conference presentation

ION-BEAM INDUCED MIXING IN PD THIN-FILMS ON SILICON

Abstract

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