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RBS/simulated annealing and FTIR characterisation of BCN films deposited by dual cathode magnetron sputtering
Conference presentation   Peer reviewed

RBS/simulated annealing and FTIR characterisation of BCN films deposited by dual cathode magnetron sputtering

NP Barradas, C Jeynes, Y Kusano, JE Evetts and IM Hutchings
APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, PTS 1 AND 2, Vol.475, pp.504-507
15th International Conference on the Application of Accelerators in Research and Industry (UNIV N TEXAS, DENTON, TX, 04/11/1998–07/11/1998)
01/01/1999

Abstract

Science & Technology Physical Sciences Technology Chemistry Physical Materials Science Characterization & Testing Physics Atomic Molecular & Chemical Physics Nuclear Physics Particles & Fields Spectroscopy Chemistry Materials Science Physics CARBON NITRIDE FILMS MECHANICAL-PROPERTIES VAPOR-DEPOSITION THIN-FILMS NITROGEN BORON IMPLANTATION COATINGS
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