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Laterally resolved crystalline damage in single-point-diamond-turned silicon
Journal article   Peer reviewed

Laterally resolved crystalline damage in single-point-diamond-turned silicon

C Jeynes, KE Puttick, LC Whitmore, K Gartner, AE Gee, DK Millen, RP Webb, RMA Peel and BJ Sealy
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.118(1-4), pp.431-436
01/09/1996
DOI: https://doi.org/10.1016/0168-583X(95)01464-0

Abstract

Science & Technology Technology Physical Sciences Instruments & Instrumentation Nuclear Science & Technology Physics Atomic Molecular & Chemical Physics Nuclear Physics INSTRUMENTS & INSTRUMENTATION NUCLEAR SCIENCE & TECHNOLOGY PHYSICS ATOMIC MOLECULAR & CHEMICAL PHYSICS NUCLEAR TRANSMISSION ELECTRON-MICROSCOPY NANOMACHINED SILICON
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