Progress in understanding liquid-metal ion source operation

RG Forbes; Z Djuric

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Conference presentation

Progress in understanding liquid-metal ion source operation

RG Forbes and Z Djuric

IVMC '96 - 9TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, pp.468-472

9th International Vacuum Microelectronics Conference(IVMC'96) (ST PETERSBURG, RUSSIA, 07/07/1996 - 12/07/1996)

01/01/1996

Abstract

Science & Technology

Technology

Physical Sciences

Engineering

Multidisciplinary

Engineering

Electrical & Electronic

Materials Science

Multidisciplinary

Physics

Applied

Engineering

Materials Science

Physics

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Title: Progress in understanding liquid-metal ion source operation
Creators: RG Forbes
Z Djuric
Contributors: I E E E (Publisher)
Publication Details: IVMC '96 - 9TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, pp.468-472
Conference: 9th International Vacuum Microelectronics Conference(IVMC'96) (ST PETERSBURG, RUSSIA, 07/07/1996 - 12/07/1996)
Date published: 01/01/1996
Date submitted: 17/05/2017
Identifiers: 99513720902346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Progress in understanding liquid-metal ion source operation

Abstract

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