- Title
- Comparison of elemental boron and boron halide implants into silicon
- Creators
- JA SharpRM GwilliamBJ SealyC JeynesJJ HamiltonKJ Kirkby
- Contributors
- ELSEVIER SCIENCE BV (Publisher)
- Publication Details
- NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.237(1-2), pp.93-97
- Conference
- 15th International Conference on Ion Implantation Technology (Taipei, TAIWAN, 25/10/2004 - 27/10/2004)
- Date published
- 01/08/2005
- Date submitted
- 17/05/2017
- Identifiers
- 99513719502346
- Academic Unit
- University of Surrey
- Resource Type
- Conference presentation
Conference presentation
Comparison of elemental boron and boron halide implants into silicon
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, Vol.237(1-2), pp.93-97
15th International Conference on Ion Implantation Technology (Taipei, TAIWAN, 25/10/2004 - 27/10/2004)
01/08/2005
Metrics
33 Record Views