A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation

MA Baker; P Hammer

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A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation

Journal article

Peer reviewed

A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation

MA Baker and P Hammer

SURFACE AND INTERFACE ANALYSIS, Vol.25(9), pp.629-642

01/08/1997

Abstract

Science & Technology

Physical Sciences

Chemistry

Physical

Chemistry

CHEMISTRY

PHYSICAL

XPS

FTIR

carbon nitride

thin film

simulation

NITRIDE THIN-FILMS

AMORPHOUS-CARBON

SPECTROSCOPY

GRAPHITE

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Title: A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation
Creators: MA Baker
P Hammer
Publication Details: SURFACE AND INTERFACE ANALYSIS, Vol.25(9), pp.629-642
Publisher: WILEY-BLACKWELL
Date published: 01/08/1997
Date submitted: 17/05/2017
Identifiers: 99513647902346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

A study of the chemical bonding and microstructure of ion beam-deposited CNx films including an XPS C 1s peak simulation

Abstract

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