Logo image
Open Research University homepage
Surrey researchers Sign in
Industrial Challenges in Ion Beam Processing and Metrology in the 3D Era
Journal article   Peer reviewed

Industrial Challenges in Ion Beam Processing and Metrology in the 3D Era

JG England and W Moller
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol.365(Part A), pp.105-109
15/12/2015

Abstract

Ion-implantation Ion beam modelling Plasma doping 3D NAND Electronic Engineering

Metrics

Details

Logo image

Usage Policy