Fabrication of a self-aligned microtip field emission array

RD Forrest; DC Cox; YF Tang; JM Shannon; SRP Silva

doi:10.1116/1.1596221

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Fabrication of a self-aligned microtip field emission array

Conference presentation

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Fabrication of a self-aligned microtip field emission array

RD Forrest, DC Cox, YF Tang, JM Shannon and SRP Silva

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol.21(4), pp.1560-1565

15th International Vacuum Microelectronics Conference (IVMC) (UNIV LYON, LYON, FRANCE, 07/07/2002 - 11/07/2002)

01/07/2003

DOI: https://doi.org/10.1116/1.1596221

Abstract

Science & Technology

Technology

Physical Sciences

Engineering

Electrical & Electronic

Nanoscience & Nanotechnology

Physics

Applied

Engineering

Science & Technology - Other Topics

Physics

ENGINEERING

ELECTRICAL & ELECTRONIC

NANOSCIENCE & NANOTECHNOLOGY

PHYSICS

APPLIED

AMORPHOUS-SILICON

CARBON

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Title: Fabrication of a self-aligned microtip field emission array
Creators: RD Forrest
DC Cox
YF Tang
JM Shannon
SRP Silva
Contributors: A V S AMER INST PHYSICS (Publisher)
Publication Details: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol.21(4), pp.1560-1565
Conference: 15th International Vacuum Microelectronics Conference (IVMC) (UNIV LYON, LYON, FRANCE, 07/07/2002 - 11/07/2002)
Date published: 01/07/2003
Date submitted: 17/05/2017
Identifiers: 99513398902346
Academic Unit: University of Surrey
Resource Type: Conference presentation

Fabrication of a self-aligned microtip field emission array

Abstract

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