Comparative measurements of piezoelectric coefficient of PZT films by Berlincourt, interferometer, and vibrometer methods

Z Huang; Q Zhang; S Corkovic; R Dorey; RW Whatmore

doi:10.1109/TUFFC.2006.175

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Comparative measurements of piezoelectric coefficient of PZT films by Berlincourt, interferometer, and vibrometer methods

Journal article

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Comparative measurements of piezoelectric coefficient of PZT films by Berlincourt, interferometer, and vibrometer methods

Z Huang, Q Zhang, S Corkovic, R Dorey and RW Whatmore

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, Vol.53(12), pp.2287-2293

01/12/2006

DOI: https://doi.org/10.1109/TUFFC.2006.175

Abstract

Science & Technology

Technology

Acoustics

Engineering

Electrical & Electronic

Engineering

ACOUSTICS

ENGINEERING

ELECTRICAL & ELECTRONIC

FIELD-INDUCED STRAINS

THIN-FILMS

LASER INTERFEROMETER

ELECTROSTRICTIVE STRAINS

CERAMICS

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Title: Comparative measurements of piezoelectric coefficient of PZT films by Berlincourt, interferometer, and vibrometer methods
Creators: Z Huang
Q Zhang
S Corkovic
R Dorey
RW Whatmore
Publication Details: IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, Vol.53(12), pp.2287-2293
Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Date published: 01/12/2006
Date submitted: 17/05/2017
Identifiers: 99513386902346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Comparative measurements of piezoelectric coefficient of PZT films by Berlincourt, interferometer, and vibrometer methods

Abstract

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