Fabrication and modeling of high-frequency PZT composite thick film membrane resonators

FFC Duval; RA Dorey; RW Wright; ZR Huang; RW Whatmore

doi:10.1109/TUFFC.2004.1350953

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Fabrication and modeling of high-frequency PZT composite thick film membrane resonators

Journal article

Peer reviewed

Fabrication and modeling of high-frequency PZT composite thick film membrane resonators

FFC Duval, RA Dorey, RW Wright, ZR Huang and RW Whatmore

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, Vol.51(10), pp.1255-1261

01/10/2004

DOI: https://doi.org/10.1109/TUFFC.2004.1350953

Abstract

Science & Technology

Technology

Acoustics

Engineering

Electrical & Electronic

Engineering

ACOUSTICS

ENGINEERING

ELECTRICAL & ELECTRONIC

ULTRASONIC TRANSDUCERS

ACOUSTIC RESONATORS

FILTERS

LEAD

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Title: Fabrication and modeling of high-frequency PZT composite thick film membrane resonators
Creators: FFC Duval
RA Dorey
RW Wright
ZR Huang
RW Whatmore
Publication Details: IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, Vol.51(10), pp.1255-1261
Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Date published: 01/10/2004
Date submitted: 17/05/2017
Identifiers: 99513381602346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

Fabrication and modeling of high-frequency PZT composite thick film membrane resonators

Abstract

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