THE EFFECT OF BEAM DIVERGENCE ON SINGLE-CRYSTAL IMPLANT PROFILES

IR CHAKAROV; RP WEBB

doi:10.1016/0042-207X(93)90177-C

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THE EFFECT OF BEAM DIVERGENCE ON SINGLE-CRYSTAL IMPLANT PROFILES

Journal article

Peer reviewed

THE EFFECT OF BEAM DIVERGENCE ON SINGLE-CRYSTAL IMPLANT PROFILES

IR CHAKAROV and RP WEBB

VACUUM, Vol.44(3-4), pp.325-329

01/03/1993

DOI: https://doi.org/10.1016/0042-207X(93)90177-C

Abstract

Science & Technology

Technology

Physical Sciences

Materials Science

Multidisciplinary

Physics

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Materials Science

Physics

MATERIALS SCIENCE

MULTIDISCIPLINARY

PHYSICS

APPLIED

COMPUTER

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Title: THE EFFECT OF BEAM DIVERGENCE ON SINGLE-CRYSTAL IMPLANT PROFILES
Creators: IR CHAKAROV
RP WEBB
Publication Details: VACUUM, Vol.44(3-4), pp.325-329
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Date published: 01/03/1993
Date submitted: 17/05/2017
Identifiers: 99513355502346
Academic Unit: University of Surrey
Language: English
Resource Type: Journal article

THE EFFECT OF BEAM DIVERGENCE ON SINGLE-CRYSTAL IMPLANT PROFILES

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